TY  - BOOK
AU  - Chang,C.Y.
AU  - Sze,S.M.
TI  - ULSI technology
T2  - McGraw-Hill series in electrical and computer engineering
SN  - 0070630623
PY  - 1996///
CY  - New York, London
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Ultra large scale integration
ER  -